dc.date.accessioned | 2021-04-15T19:52:12Z | |
dc.date.available | 2021-08-06T22:45:48Z | |
dc.date.created | 2021-01-15T13:14:39Z | |
dc.date.issued | 2020 | |
dc.identifier.citation | Kvalvik, Julie Nitsche Kvamme, Kristian Breivik Almaas, Kjetil Ruud, Amund Sønsteby, Henrik Hovde Nilsen, Ola . LiF by atomic layer deposition—Made easy. Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. 2020, 38(5), 1-4 | |
dc.identifier.uri | http://hdl.handle.net/10852/85284 | |
dc.description.abstract | Lithium fluoride (LiF) is an integral part of UV optics. Recently, it has also gained attention for its role in the solid-electrolyte interphase on the anode of lithium-ion batteries. Atomic layer deposition (ALD) is the preferred tool for synthesizing conformal and pin-hole free LiF thin films, especially on high aspect ratio structures. Present routes to deposit LiF by ALD are based on HF or HF-pyridine as the fluorine source, requiring strict safety precautions. Other routes involve TiF4 or WF6, resulting in inclusions of Ti or W impurities in the resulting films. Herein, we present a new route to deposit LiF by ALD, using lithium tert-butoxide (LiOtBu) and NH4F as precursors. The process yields uniform films over a broad temperature range (150–300 °C), with a growth per cycle of 50.9 pm/cycle (225 °C). The films are free from any nitrogen contamination from the NH4F precursor. This process provides a facile route for high purity LiF thin films with the use of less harmful precursor chemistry. | |
dc.language | EN | |
dc.title | LiF by atomic layer deposition—Made easy | |
dc.type | Journal article | |
dc.creator.author | Kvalvik, Julie Nitsche | |
dc.creator.author | Kvamme, Kristian Breivik | |
dc.creator.author | Almaas, Kjetil | |
dc.creator.author | Ruud, Amund | |
dc.creator.author | Sønsteby, Henrik Hovde | |
dc.creator.author | Nilsen, Ola | |
cristin.unitcode | 185,15,12,0 | |
cristin.unitname | Kjemisk institutt | |
cristin.ispublished | true | |
cristin.fulltext | original | |
cristin.qualitycode | 1 | |
dc.identifier.cristin | 1872127 | |
dc.identifier.bibliographiccitation | info:ofi/fmt:kev:mtx:ctx&ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.jtitle=Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films&rft.volume=38&rft.spage=1&rft.date=2020 | |
dc.identifier.jtitle | Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films | |
dc.identifier.volume | 38 | |
dc.identifier.issue | 5 | |
dc.identifier.doi | https://doi.org/10.1116/6.0000314 | |
dc.identifier.urn | URN:NBN:no-87898 | |
dc.type.document | Tidsskriftartikkel | |
dc.type.peerreviewed | Peer reviewed | |
dc.source.issn | 0734-2101 | |
dc.identifier.fulltext | Fulltext https://www.duo.uio.no/bitstream/handle/10852/85284/2/6.0000314.pdf | |
dc.type.version | PublishedVersion | |
cristin.articleid | 050401 | |
dc.relation.project | NFR/272253 | |
dc.relation.project | NFR/244087 | |
dc.relation.project | NFR/262387 | |
dc.relation.project | NFR/143732 | |