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  • Wang, Zhengpeng; Yu, Xinxin; Gong, Hehe; Hu, Tiancheng; Zhang, Yijun; Ji, Xiaoli; Ren, Fangfang; Gu, Shulin; Zheng, Youdou; Zhang, Rong; Kuznetsov, Andrej; Ye, Jiandong (Journal article / Tidsskriftartikkel / SubmittedVersion, 2022)
    Surface treatment after dry etching is vital to enhance the surface quality of the material and thus improve device performance. In this Letter, we identified the majority surface states induced by the dry etching of β-Ga2O3 ...