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  • Long, Ethan Schuyler; Galeckas, Augustinas; Kuznetsov, Andrej; Ronda, Antoine; Favre, Luc; Berbezier, Isabelle; Radamson, Henry H. (Journal article / Tidsskriftartikkel / PublishedVersion; Peer reviewed, 2013)
    The present study examines the kinetics of dry thermal oxidation of (111), (110), and (100) silicon-germanium (SiGe) thin epitaxial films and the redistribution of Ge near the oxidation interface with the aim of facilitating ...