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  • Sønsteby, Henrik Hovde; Yanguas-Gil, Angel; Elam, Jeffrey W. (Journal article / Tidsskriftartikkel / PublishedVersion; Peer reviewed, 2020)
    Atomic layer deposition (ALD) is a thin film synthesis technique that can provide exquisite accuracy and precision in film thickness and composition even on complex, large area substrates. Based on self-limiting surface ...