Browsing Kjemisk institutt by Author "Kvamme, Kristian"

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  • Phosphites as precursors in atomic layer deposition thin film synthesis 
    Kvamme, Kristian; Ruud, Amund; Weibye, Kristian; Sajavaara, Timo; Nilsen, Ola (Journal article / Tidsskriftartikkel / PublishedVersion; Peer reviewed, 2021)
    We here demonstrate a new route for deposition of phosphorous based materials by atomic layer deposition (ALD) using the phosphites Me3PO3 or Et3PO3 as precursors. These contain phosphorous in the oxidation state (III) and ...